✓Real-time Connectors: SECS/GEM, OPC-UA, KLA-T API, REST API
✓Trend Analysis: 90-day
✓Alerts: Email, SMS, WhatsApp, Teams
✓Multi-site Aggregation
📈 Real-time Chart
metric:inspection_yield
unit:%
timeframe:real-time
chart type:line
min threshold:85
max threshold:99.5
target:97
update interval ms:5000
data source:SECS/GEM
topic:wafer/inspection/yield
📊 KPI Card
metric:particle_defect_density
label:Particle Density
format:decimal_1
unit:defects/cm²
target:0.1
critical high:1
description:Particle defect density — critical for sub-10nm nodes, target <0.1/cm²
📊 KPI Card
metric:lpd_count
label:LPD Count
format:integer
unit:defects/wafer
target:5
critical high:50
description:Light Point Defects per wafer — particle contamination indicator
📊 KPI Card
metric:wafer_bow
label:Wafer Bow (μm)
format:decimal_1
target:30
critical high:80
description:Wafer bow measurement — exceeds 80μm causes lithography focus issues
📊 KPI Card
metric:flatness_nirts
label:Flatness (nm)
format:integer
unit:nm SFQR
target:50
critical high:200
description:Site flatness (SFQR) — critical dimension for EUV lithography alignment
📉 Trend Analysis
metrics:["inspection_yield","particle_defect_density","lpd_count"]
periods:[7,30,90]
chart type:multi_line
show control limits:true
show cppk:true
export format:["pdf","csv","xlsx"]
📋 Data Table
title:Wafer Inspection Lot Log
columns:[{"key":"lot_id","label":"Lot ID","sortable":true},{"key":"wafer_id","label":"Wafer","sortable":true},{"key":"layer","label":"Layer","sortable":true},{"key":"inspection_tool","label":"Tool","sortable":true},{"key":"yield_pct","label":"Yield %","type":"number","sortable":true},{"key":"defect_count","label":"Defects","type":"number","sortable":true},{"key":"lpd","label":"LPD","type":"number","sortable":true},{"key":"bow_um","label":"Bow (μm)","type":"number","sortable":true},{"key":"classification","label":"Class","type":"badge","badges":{"prime":"green","test":"blue","scrap":"red","rework":"yellow"}}]
sort by:lot_id
sort order:desc
filters:["layer","inspection_tool","classification","date_range"]
pagination:25
📄 Compliance Report
standards:["SEMI M1","IATF 16949","JEDEC JESD22"]
report types:["inspection_certificate","defect_map_analysis","spc_control_chart","lot_traveler"]
frequency:per_lot
auto generate:true
pdf template:wafer_inspection_certificate
include signature block:true
retention days:3650
🔔 Alert Engine
rules:[{"name":"Yield Drop","metric":"inspection_yield","condition":"below","threshold":90,"severity":"critical","message":"Inspection yield below 90% — possible process drift or contamination event","channels":["email","sms","whatsapp"],"escalate_after_min":10},{"name":"Particle Spike","metric":"particle_defect_density","condition":"above","threshold":1,"severity":"critical","message":"Particle density above 1.0/cm² — investigate cleanroom integrity and equipment","channels":["email","sms","whatsapp"],"escalate_after_min":5},{"name":"Wafer Geometry Alert","metric":"wafer_bow","condition":"above","threshold":80,"severity":"warning","message":"Wafer bow exceeds 80μm — lithography focus at risk","channels":["email","whatsapp"]}]
channels:{"email":{"enabled":true,"recipients":["fab_engineer","qa_manager","process_engineer"]},"sms":{"enabled":true,"recipients":["fab_engineer"]},"whatsapp":{"enabled":true,"group":"wafer_inspection"}}
🏭 Site Aggregator
max sites:6
metrics:["inspection_yield","particle_defect_density","lpd_count"]
comparison mode:side_by_side
ranking metric:inspection_yield
Compliance Standards
SEMI M1 (Silicon Wafer Specifications)SEMI M59 (Terminology for Silicon Technology)IATF 16949 (Automotive Quality)JEDEC JESD22 (Test Methods)ISO 14644-1 (Cleanroom Classification)
Supported Data Connectors
SECS/GEM
● Connected
OPC-UA
● Connected
KLA-T API
● Connected
REST API
● Connected